5nm, 10nm high-precision feedback controller
Control of positioning with a resolution of 10nm for the ball screw.
Achieving a resolution of 10nm without using piezo elements with a stroke of 20-50mm.
- Company:ワイヤード
- Price:1 million yen-5 million yen
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Control of positioning with a resolution of 10nm for the ball screw.
Achieving a resolution of 10nm without using piezo elements with a stroke of 20-50mm.